Influence of the Viscoelastic Properties of the Polyimide Dielectric Coating on the Wafer Warpage
Influence of the Viscoelastic Properties of the Polyimide Dielectric Coating on the Wafer Warpage
Chunsheng Zhu,Wenguo Ning,Gaowei Xu,L. Luo
2014 · DOI: 10.1007/s11664-014-3255-6
Journal of Electronic Materials · 15 Citations