Wafer warpage analysis of stacked wafers for 3D integration
Wafer warpage analysis of stacked wafers for 3D integration
Youngrae Kim,Sungbum Kang,Sungdong Kim,S. Kim
2012 · DOI: 10.1016/J.MEE.2011.01.079
50 Citations
Wafer warpage analysis of stacked wafers for 3D integration
Youngrae Kim,Sungbum Kang,Sungdong Kim,S. Kim