Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors
Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors
S. Cheema,N. Shanker,43 Authors,S. Salahuddin
2022 · DOI: 10.1038/s41586-022-04425-6
Nature · 329 Citations