Special Issue “Building Three-Dimensional Integrated Circuits and Microsystems”
Special Issue “Building Three-Dimensional Integrated Circuits and Microsystems”
Zhiyuan Zhu,Sixiang Zhang,Shenglin Ma,Ziyu Liu
2023 · DOI: 10.3390/pr11030816
Processes · 4 Citations
Abstract
With the further innovation of chip technology, semiconductor integrated circuits have made irreplaceable contributions to the development of microelectronic systems [...]